Guest Speaker: Prof. WEI Xueyong
School of Instrument Science and Technology
Xi’an Jiaotong University
Prof. Xueyong Wei obtained his PhD in Mechanical Engineering from the University of Birmingham in 2009. He then worked in the University of Cambridge as research associate before joined Xi’an Jiaotong University in 2012. Currently, he is the head of School of Instrument Science and Technology and the leader of Shaanxi Innovation Team on Micro/Nano Sensing and Measurement Technology. His research interests include MEMS sensors, Microfluidics and Instrumentation. He has published more than 150 peer-reviewed papers and has delivered over 50 invited talks.
Prof. Wei is a Senior Member of IEEE, Senior Member of China Instrument and Control Society. He won the FK Bannister Prize of University of Birmingham (2009), Young Scientist Award of Microsystems & Nanoengineering Summit (2017), First Prize of Shaanxi Provincial Science & Technology Advancement Award (2019), and Second Prize of National Science & Technology Advancement Award (2020). He serves as the Associate Editor of Microsystems & Nanoenginering and the Section Executive Editor-in-Chief of Engineering, an international journal launched by Chinese Academy of Engineering in 2015. He has also served as session chair, organization chair of many several home and international conferences.
Abstract
MEMS resonators have been widely studied due to their advantages compared with those made of quartz crystals in sensing, timing, and filtering applications. For example, doubly clamped beam micro resonators are widely used in resonant sensors and oscillators due to their structural simplicity. As the beam stretches, nonlinear behavior is readily observed at large vibrating amplitudes. The resonance frequency of a nonlinear micromechanical resonator has a dependence on its modal amplitude known as A-f effect, which is used for frequency tuning through changing the modal amplitude. The other vibration modes, however, can also be triggered as the amplitude of main mode reaches a certain level and accordingly strong nonlinear behavior like amplitude saturation can be observed. Traditionally, the nonlinear behavior of micromechanical resonators is purposely avoided in the design or cancelled in the real applications. However, the research shows that the nonlinear behavior can also be employed to realize certain functions for improving the performance of micro devices for frequency reference and timing purpose. In this talk, I will introduce our recent work of exploring nonlinear phenomena in MEMS resonators and developing high performance sensors based on these findings.
