Exploring New Frontiers in Nanotechnology: Prof. David PUI Unpacks Applications in Microelectronics and Environmental Health

Prof. David Y. H. PUI from the University of Minnesota, U.S.A., delivered the PAIR Seminar titled “Nanoparticle Technologies in Microelectronics, Air Quality, Health Effects, and Filtration” on 13 June 2025 on the PolyU campus. The seminar drew over 60 attendees in person and engaged an online audience of more than 13,100 from various countries and regions who joined the live broadcast on social media platforms.

The seminar commenced with a warm welcome and introduction of the speaker by Prof. CHEN Qingyan, Director of PAIR. Prof. Pui began his presentation by outlining the recent advancements in nanoparticle technologies, covering instrumentation developments, ISO standards and industry partnerships. He then delved into the applications of nanoparticle technologies in four interdisciplinary areas:

1. Microelectronics: Contamination control in Extreme UV Lithography (EUVL) systems;
2. Air Quality: PM2.5 mitigation, respirators, and indoor and urban pollution controls;
3. Health Effects: Nanomedicine, bioaerosol sensors, UV-C decontamination; and
4. Filtration: Prediction of filter media performance and wildfire impacts on electret filter efficiency, and large-scale direct-capture of atmospheric CO2 to combat climate change.

In his closing remarks, Prof. Pui highlighted that nanoparticles are involved in multiple disciplines, bringing both benefits and potential harm to the environment, human health and semiconductor manufacturing. He underscored the importance of collaborative fundamental and applied research between academia and industry to foster a sustainable future, urging stronger partnerships among governments, industries and researchers to create a healthier and more prosperous society in the long run.

Following the presentation was a lively question-and-answer session moderated by Ir Prof. GUO Hai, Management Committee Member of the Research Institute for Land and Space (RILS), Member of the Research Institute for Sustainable Urban Development (RISUD) and Professor in the Department of Civil and Environmental Engineering. The audience engaged in a productive dialogue with Prof. Pui.

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