Faculty of Science

Sept 2024 Entry


1 year



Application Deadline
Local - Full-time
Sept 2024 Entry - 30-Apr-2024
Non-local - Full-time
Sept 2024 Entry - 30-Apr-2024
About Programme
How to Apply
Aims & Characteristics

The Master of Science in Microelectronics Technology and Materials is designed to nurture high-calibre talents with the knowledge and hands-on skills needed for contributing to the development of the booming semiconductor industry.


Based on the expertise of the Department of Applied Physics in device physics and materials science research, this one-year programme provides students with a unique, professionally oriented education in the process flow of microelectronics and integrated circuit design, simulation, fabrication and processing, characterisation, and inspection.


Upon graduation, students are expected to demonstrate:

  • Professional competence as specialists/leaders in the field/industry: Graduates possess knowledge of and skills in microelectronics technology and materials and are able to apply their knowledge and demonstrate professionalism and leadership in the field.

  • Strategic thinking: Graduates are able to think holistically and analytically when dealing with complex problems and situations. They are versatile problem solvers with good critical and creative thinking skills and can generate practical and innovative solutions.

  • Lifelong learning capability: Graduates have an enhanced capability for continuous professional development through inquiry and reflection on professional practice.

Recognition & Prospects

The MSc in Microelectronics Technology and Materials provides extensive training for physicists and engineers to help meet the national, regional and local demand for talents in the microelectronics industry. The programme is tailormade to nurture expertise in integrated circuit design and manufacturing, in line with the national policy to support the development of scientific research and advanced manufacturing. This policy is strongly supported by local policies in Hong Kong and the Greater Bay Area, guaranteeing the career prospects of our graduates.


A total of 30 credits are required for graduation, including 18 credits from Core Subjects and 12 credits from Elective Subjects/an Elective Project. 


Core Subjects (3 credits for each subject)

  • Advanced Materials Analysis and Characterisation
  • Integrated Circuits Design
  • Integrated Circuit Processing and Laboratory
  • Semiconductor Devices and Systems
  • Semiconductor Materials and Processing
  • Statistics and Data Analytics

Elective Subjects/Project (3 credits for each subject, unless specified in brackets)

  • Artificial Intelligence for Materials Science
  • Emerging Memory Technologies
  • Machine Vision for Semiconductor Manufacturing and Inspections
  • Microelectronics Packaging and Reliability
  • Microelectromechanical Systems (MEMS) and Sensors
  • Project (6 credits)
  • Thin Film Materials and Preparation Technologies
Credit Required for Graduation


Programme Leader(s)

Prof. Siu Fung YU
BSc, PhD

Subject Area
Microelectronics Technology and Materials
Entrance Requirements

A Bachelor’s degree with Honours in science, engineering or equivalent qualifications. Preference will be given to applicants with relevant work experience in microelectronics industries.


If you are not a native speaker of English, and your Bachelor’s degree or equivalent qualification is awarded by institutions where the medium of instruction is not English, you are expected to fulfil the University’s minimum English language requirement for admission purpose. Please refer to the “Admission Requirements” section for details.


Please email to apdept@polyu.edu.hk

Initial Registration Credits


Tuition Fee

HK$6,850 per credit for local and non-local students

Additional Documents Required
Transcript / Certificate


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