Sawatec HMDS Hotplate HP-200

Introduction:

HMDS vapor priming has been used for improving resist wetting and adhesion to substrates. Our hotplate can process dehydration and priming of wafer with HMDS with temperature control.

Specifications:

• Coating: For HMDS coating
• Max. substrate size: 200mm
• Temperature: 25 - 250°C
• Accuracy:  ± 0.5°C per 100°C

Notes to user:

Supplier information:

         https://sawatec.com/en/

Equipment location:

Room HJ705 (Class 100)