Laser Precision Engineering: from Micro-scale to Nano-scale
Distinguished Research Seminar Series
18 Jan 2023
Department of Industrial and Systems Engineering, PolyU; Research Institute for Advanced Manufacturing (RIAM)
10:00 - 11:30
Online via ZOOM
Professor Minghui Hong
Meeting link will be sent to successful registrants
Laser precision engineering in ambient air has unique advantages as a non-contact and high-speed process. It is a key advanced manufacturing approach for high quality micro/nano-structures’ fabrication. In the past decades, we have witnessed its extensive applications in research laboratories and production lines. Combined with some advanced processing tools, such as AFM and NSOM, laser precision engineering’s resolution can be pushed down to 10 ~ 25 nm, much smaller than Optical Diffraction Limit, which provides an excellent opportunity for the nano-manufacturing. In this talk, the physics behind laser-matter interactions will be reviewed. How to achieve small heat affected zone (HAZ) is one critical challenge for high quality laser precision engineering to push its resolution from micro-scale to nano-scale. The next critical challenge is how to ensure high enough nano-fabrication speed to meet industrial needs. Since one beam laser processing at high resolution could not achieve such mission, parallel laser beam processing is developed to cater for both high resolution and high speed at the same time. Another challenge is how to carry out the laser nano-structuring in far field as the near field processing requires the tiny optics working very close to sample surfaces, which makes the laser nanofabrication in near field be only suitable for very limited super-smooth surface samples. Our recent research shows that hybrid pulsed laser processing in far field and in ambient air is a novel method to make ~15 nm features directly on Si surfaces. With better understanding of the complicated physics behind this unique experimental result, as well as further fine tuning of our experimental setup and laser processing parameters, it is highly possible to bring our laser precision engineering resolution down to ~10 nm.
Professor Minghui Hong
Tan Kah Kee Chair Professor,
Department of Mechanical and Electrical Engineering,
Xiamen University, China.
Prof. Hong Minghui specializes in laser microprocessing & nanofabrication. He has co-authored 15 book chapters, 42 patents granted, and 500+ scientific papers in Nature, Chemical Reviews, Nature Nanotechnology, Advanced Materials, Advances in Optics and Photonics, Nano Letters, Light: Science and Applications, ACS Nano, Science Advances, Nature Communications, and Laser & Photonics Reviews etc. and 100+ plenary/keynote/invited talks in international conferences. He is a member of organizing committees for Laser Precision Micromachining International Conference (2001~2024), International Symposium of Functional Materials (2005, 2007 and 2014), Chair of International Workshop of Plasmonics and Applications in Nanotechnologies (2006), Chair of Conference on Laser Ablation (2009) and Chair of Asia-Pacific Near-field Optics Conference (2013 and 2019). Prof. Hong is invited to serve as an Editor of Light: Science and Applications, Engineering, Science China G, Laser Micro/nanoengineering, and Executive Editor-in-chief of Opto-Electronic Advances and Opto-Electronic Sciences. Prof. Hong is Fellow of Academy of Engineering, Singapore (FSEng), Fellow of Optical Society of America (OSA), Fellow of International Society for Optics and Photonics (SPIE), Fellow of International Academy of Photonics and Laser Engineering (IAPLE) and Fellow of Institution of Engineers, Singapore (IES). Prof. Hong is currently the Tan Kah Kee Chair Professor, Xiamen University, China. Before he joined Xiamen University in August 2022, Prof. Hong was a Full Professor and the Director of Advanced Research and Technology Innovation Centre (ARTIC), Director of Optical Science and Engineering Centre (OSEC) in the National University of Singapore. He is also a founder of Phaos Technology Pte. Ltd. and Opto Science Pte. Ltd.
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