Prof. Toshiro Doi

Kyushu University &

Saitama University/

Doi Laboratory Inc.


Evaluation strategy of dynamic electrochemical reactions for detailed elucidation of ultra-precise CMP mechanism: Development of a new “d-EC” devices

Abstract: In recent years, with the aim of constructing and realizing next-generation high-performance 3D mounting devices that have been in the limelight, constituent materials and their ultra-precision processing have become important and urgent issues. Focusing on the key ultra-precise planarization CMP technology, this paper introduces a new dynamic electrochemical reaction measurement and evaluation system developed to optimize CMP slurries for wiring metals. Tafel plot evaluation, which statically grasps electrochemical data in a slurry filled beaker, is generally well known as a means of analyzing metal corrosion. However, this alone is insufficient, and it is important to clarify the electrochemical behavior during CMP. Therefore, based on the processing mechanism of CMP, a mechanical unit consisting of various electrodes equipped with a control mechanism for rotation drive and pressure set in a noise protection case, metal (working electrode) to be measured, slurry container (cell), etc., and developed a new "dynamic electrochemical reaction evaluation system (d-EC)" consisting of an electrical control unit with a built-in potentiate system. It was clarified that the metal surface in the dynamic state "during CMP" is completely different from the electrochemical reaction state of the metal surface in the static state. This will affect the performance of CMP. Here, by using the developed dynamic electrochemical measurement system (d-EC), the relation between current density and applied voltage/Tafel plot curve in the static and dynamic states of metal (e.g., Cu) in slurry is analyzed for acid/alkaline chemicals, various small amounts of additives such as surfactants, and measurement examples when changing mechanical processing conditions. Tafel plots obtained from these measurement data provide suggestions for new slurry development or slurry improvement and optimization and allow us to consider the CMP mechanism. The developed d-EC system is expected to contribute to the realization of next-generation 3D semiconductor devices.

Biography: Prof. Doi embarked on his academic journey at Yamanashi University, where he earned his Bachelor of Science degree in Precision Engineering in 1971. He obtained a Master of Science degree in the same discipline from the same institution in 1973. In 1985, He completed his Ph.D. in Doctor of Engineering from The University of Tokyo, Japan. He served as a Senior Research Engineer at the Electrical Communication Laboratory (ECL) Nippon Telegraph &Telephone Corporation (NTT) in Tokyo, Japan, from 1973 to 1988. In 1988, he joined the Department of Education at Saitama University in Japan as a Professor. During this time, he also took on additional responsibilities, such as being a Visiting Professor at the University of Arizona, USA, from 2003 to 2005. He assumed the position of President of Doi Laboratory Inc. in 2018. In addition, he held the esteemed title of Professor at Kyushu University of graduate school/GIC from 2007 to 2018. He is a concurrent member of various prestigious organizations, including The Engineering Academy of Japan (EAJ) and the Institute of Physical & Chemical Research (RIKEN), where he serves as a Visiting Researcher. Additionally, he is a Visiting Professor at Dalian University of Technology in China and a Fellow of the Japan Society of Precision Engineering (JSPE). Furthermore, Prof. DIO holds a special place in the Japan Opto-mechatronics Association (JOEM) as Advisor and Editor-in-Chief. He is also the Founder and Distinguished Chairman of the Planarization CMP Committee of JSPE. Prof. Doi's dedication and outstanding contributions have garnered him numerous awards and honors throughout his career. Notable accolades include The Outstanding Achievement Award from the International Conference of Planarization/CMP Technology (ICPT) in 2022, the Precision Engineering Award from the Japan Society of Precision Engineering (JSPE), Best Paper Award from the Japan Society of Mechanical Engineers (JSME), and the Engineering Award from JSME. In total, he has received 21 prestigious awards, including the Precision Measuring Engineering Promotion Society/Takagi Award and the Machine Tool Engineering Promotion Award.
Prof. Doi has authored and co-authored numerous publications, articles, and patents. Notable works include "Details of Semiconductor CMP Technology," "Handbook of Ceramics Grinding and Polishing Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices," and "Handbook of Ceramics Grinding and Polishing" (2E). His publications span over 350 technical papers, with a total of 187 including overseas and pending patents.



Prof. Wei Gao

Tohoku University


On-machine measurement technologies for ultraprecision machining

Abstract: In the manufacturing process of a precision part, it is a common operation to measure the machined part for the purpose of quality control. It is effective to make the measurement under on-machine conditions for assurance of accuracy and efficiency of the measurement operation as well as the manufacturing process. This keynote presents a number of scanning-type on-machine measurement systems for ultraprecision machining. Scanning-type measuring systems have the advantages of simple structure, flexibility to the size and shape of the specimen as well as the robustness to measurement environment. The measuring time can be shortened by increasing the scanning speed. Such systems also have critical challenges to confront, including reduction of scanning errors and thermal errors, automatic alignment of measuring positions, fast measurement strategies, etc. Sensor technologies and error compensation algorithms for accurate measurement of both fundamental geometries such as straightness, and complicated forms such as sharp tool edges are addressed in the keynote in responding to the challenges.

Biography: Prof. Gao received his Bachelor from Shanghai Jiao Tong University in 1986, followed by MSc and Ph. D from Tohoku University in 1991 and 1994, respectively. He is currently a professor in the Department of Finemechanics of Tohoku University. His research interests lie primarily in the field of precision engineering, specialized in precision nanometrology. He is an author of the books “Precision Nanometrology” (Springer), “Surface Metrology for Micro- and Nanofabrication” (Elsevier), “Optical Metrology for Precision Engineering” (De Gruyter). He was awarded the Prize for Science and Technology from the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, in 2019. He is a Fellow of CIRP, ISNM, JSPE and a Fellow of The Engineering Academy of Japan (EAJ).



Prof. Han Huang

Sun Yat-sen University


Ductile grinding of brittle single crystal semiconductors

Abstract: Brittle single crystal semiconductors must often be shaped to a high degree of precision with little subsurface damage using ductile grinding prior to the final polishing process. An in-depth understanding of the removal mechanism involved in ductile machining of such brittle solids can thus help develop the efficient shaping process, hence shorten machining time, and reduce the associated cost. This talk addresses the science involved in the ductile removal of brittle materials and outlines the scientific aspects on ductile grinding of brittle solids. A holistic approach for determining the threshold ductile removal is provided with the contact mechanics as the basis for analysis. The effects of microstructure and machining diversities on the deformation and removal mechanisms involved in grinding are also discussed.

Biography: Han Huang is a Chair Professor at School of Advanced Manufacturing, Sun Yat-sen University, China, and an Emeritus Professor of Mechanical Engineering at The University of Queensland, Australia. He has been leading a group of researchers to develop advanced manufacturing technologies, particularly ductile grinding processes for brittle solids, in the past decades. Professor Huang obtained his PhD at The University of Western Australia and ME and BE at Huazhong University of Science and Technology, China. He has published over 320 peer-reviewed journal articles with a total citation of over 11,600 times, giving him an h-index of 59. He received a number of research accolades including Australia Research Council Future Fellow, Australian Research Fellow,Queensland International Fellow, JSPS Invitation Senior Fellow, and Singapore National Technology Award. Professor Huang is an Associate Editor of International Journal of Mechanical Sciences and International Journal of Extreme Manufacturing.



Prof. Bing Li

Harbin Institute of Technology, Shenzhen


Robotic Based Manufacturing Systems

Abstract: Robotic technologies have a strong foothold in a variety of industrial fields, especially in their original intent use of manufacturing. Although several aspects stimulate the use of robots in machining, such as low cost and flexibility, the employment of robots for machining operations has been slowed down or sometimes inhibited by many challenges. Like machine tools, robotic based manufacturing systems can accomplish multiple machining tasks by exploiting different configurations. This talk gives an overview of the ongoing challenges in robotic based manufacturing systems with different robot configurations. After introducing the research background and significance, three typical topologies, i.e., serial mechanism, parallel mechanism, and hybrid mechanism are emphatically introduced. Special attention is given to robotic milling with serial mechanism, robotic polishing with parallel mechanism, robotic polishing with hybrid mechanism, multi-robot cooperative polishing, spraying and welding, and thin-wall machining with an isomeric robotic system. This talk will not only provide the design and analysis methods for the mechanism topologies in robotized manufacturing systems but also contribute to the methods enabling optimization, process planning and control of robotized manufacturing systems, hoping to promote research and development in related fields.

Biography: Prof. Bing Li received the Ph.D. degree in mechanical engineering from The Hong Kong Polytechnic University, Hong Kong, in 2001. Currently, he is the vice-President of the Harbin Institute of Technology Shenzhen, China. His research interests include robotics and mechanisms, and robotic machining. He was a recipient of the State Technological Invention Award of China in 2014, the Natural Science Award of Shenzhen in 2016, and the Outstanding ME Alumni Award of the Hong Kong Polytechnic University in 2017. In the past five years, he has coordinated over 10 scientific research projects such as the National Key R&D Program of China, the Joint Fund of the National Natural Science Foundation of China, and the Shenzhen Peacock Innovation Team Project. He has published more than 200 papers, of which more than 120 were published in important international journals. He has also published 3 books and applied for 50 invention patents.



Prof. Yoshiharu Namba

Chubu University


Ultra-Precision Float Polishing of Optical and Electronic Materials

Abstract: Float polishing is a non-contact polishing method in which a thin layer of fluid is maintained between the workpiece and tin lap by hydrodynamic pressure effect. While it is known to consistently produce atomically flat surfaces without sub-surface damage. The lap is turned with a shape diamond tool and a fluid gap few microns in height is generated by the wedge effect of slurry. This process was used for making magnetic heads of video cassette recorders, mirrors for ring laser gyros and high-power laser optics.

Biography: Prof. Namba obtained his Bachelor of Science degree from the Faculty of Engineering at Osaka University in 1964. He continued his academic journey at Osaka University, receiving a Master of Science degree in 1966. He further pursued his studies and achieved a Ph.D. in 1970 from the same university. In 1966, Prof. Namba embarked on his professional career as a Research Associate at the Department of Precision Engineering, Faculty of Engineering, at Osaka University, where he carried out groundbreaking research. He then became a Lecturer in the same department the following year, teaching and guiding aspiring engineers. Recognized for his exceptional expertise, Prof. Namba was promoted to the position of Associate Professor in 1972. His dedication to precision engineering and commitment to advancing the field led him to become a Professor in the Department of Mechanical Engineering at Chubu University in 1987. Concurrently, he also held visiting positions at prestigious institutions internationally. He was a Visiting Associate Professor at the Department of Engineering Production at the University of Birmingham in 1976 and at the Institute of Modern Optics at the University of New Mexico in 1981-1982. In addition to his contributions as a professor and researcher, Prof. Namba has played a vital role in promoting education and collaboration. He has served as a visiting professor and professor emeritus at Chubu University and holds honorary professorships at the Harbin Institute of Technology at Weihai in China and the Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Science. He received the Contribution Award from the Japan Society of Mechanical Engineers in 2015 and the David Richardson Medal from the Optical Society of America in 1998. He was also elected as a Fellow of the Japan Society for Precision Engineering in 2007 and the Japan Society of Mechanical Engineers in 2004. He also received Ichimura Prize from the New Technology Development Foundation in 1980, Academic Paper Prize from the Japan Society for Precision Engineering in 1996 and Distinguished Services Award for Manufacturing and Machine Tool Division from the Japan Society of Mechanical Engineers in 2003. He also is Honorary Member of the Japan Society for Precision Engineering, Life time member of the Japan Society of Applied Physics and Life time member of the Society of Optics, U.S.A. Prof. Namba’s research interests have primarily revolved around Precision Engineering, Ultra-Precision Machining and Measurement for Optical Components, and Laser Machining. He is widely recognized for his inventions, including "Float Polishing," "Laser Forming," and "Ultra-Precision Surface Grinder Having Zero-Thermal Expansion Glass-Ceramics Spindle."




Prof. Hitoshi Ohmori  

RIKEN (The Institute of Physical and Chemical Research),

Saitama University


Ultra/nanoprecision Diamond Turning of Large Fresnel Lenses for Space Telescopes

Abstract: Large Fresnel lenses for cosmic ray space telescopes have been developed through application of ultra/nanoprecision diamond turning. The developed Fresnel lenses from 300mm to 1500mm in diameter are made of special PMMA which has a high transmittance for UV light and have been machined by diamond turning to be optically transparent. Pitch of grooves varies from center to edge of Fresnel lenses, and depth of grooves is categorized into two types; deep one is 1mm for refraction and shallow one is 700nm for diffraction. Square Fresnel lenses have also been developed by diamond turning through adjusting cutting conditions. Several telescope setups have been assembled. Each optical system is similarly composed of three lenses; first and third lenses are deeply grooved ones, and the middle lens is shallow diffractive one. Missions for balloon launching (EUSO balloon) have been successfully conducted, and the compact telescope (Mini-EUSO) has also been successfully launched onto ISS (International Space Station). This telescope is now used for observatory research. The series of Fresnel lens development can be applied to solar collecting lens development for natural energy utilization and agricultural research.

Biography: Prof. Ohmori graduated the University of Tokyo in 1986, and obtained doctor degree in engineering in 1991. During his student hood, he invented the ELID method which has been widely used for ultra/nanoprecision machining. He also has conducted various kinds of research and development on ultra/nanoprecision machining for optics and critical components for scientific and industrial demands. Combined processes with ELID-grinding, polishing, and surface modification have been proposed through his research activities, and have been applied to produce extremely high precision mirrors for X-ray laser reflectors and also for bio-implants. In his recent research topics, micro-fabrication and ultrafabrication for micro to macro sized machining with functional surface structures at a nanometric surface precision are being conducted to realize space observatories and solar collectors, and succeeded in manufacturing large Fresnel lenses more than 1m in diameter. He proposed “Picoprecision Technology” for the future manufacturing and has launched to develop its process and machine tool.




Prof. Satoru Takahashi

The University of Tokyo


Challenge of advanced optical technology beyond the diffraction limit for nano/micro manufacturing

Abstract: In the nano/micro manufacturing field, light energy based production technologies such as photolithography, stereolithography, and various types of laser applied in-process measurement methods have been playing important roles for manufacturing the advanced products. Generally, the spatial resolution of the light energy based technology is physically governed by the diffraction limit of freely propagating light. That means that the spatial resolution for fabrication or sensing remains limited to approximately half the wavelength of light. We conduct research on advanced light energy based micro/nano production technology, which can be applied to the next-generation nano/micro manufacturing by focusing on special localized photon energy control. In order to realize our target, it is important to optimize how to apply free-space propagating light, near-field localized light, and combinations thereof.
In this talk, I would like to present the challenges of the spatial resolution improvement of optical fabrication and measurement techniques based on localized light energy control and their possibility for next-generation microstructure manufacturing will be discussed.

Biography: Prof. Takahashi received his MS and Ph.D. degrees from the Osaka University, Japan in 1995 and 2002, and became an associate professor at the University of Tokyo (UTokyo) in 2003. He is currently a professor at the Department of Precision Engineering, UTokyo. In parallel, he was appointed as a visiting professor at the University of Toronto (UToronto), Canada in 2011. His research interests include the nano-in-process measurement, nano-scale-metrology, and nano/micro microfabrication using the advanced optics based on not only far-field optics but also localized photon energy such as evanescent light, near-field light, and so on.Throughout his career, he delivered over 50 invited talks, received 30+ academic awards, and actively engaged in academic association management. He holds leadership roles in international societies, including a Board of ASPEN, Editorial Boards of the ISNM, and an Associate Editor of Precision Engineering Journal. He's a member of various academic societies including the JSPE, JSME, JSAT, ASPE, euspen, and a fellow of ISNM, CIRP.



Prof. Suet Sandy To

The Hong Kong Polytechnic University


Ultra-precision machining of difficult-to-cut- materials

Abstract: Ultra-precision machining technology and ultra-precision freeform machining have become an indispensable tool for the design and the manufacture of high- technology and high-precision lenses. The process is capable of producing components with micrometer to sub-micrometer form accuracy and surface roughness in the nanometer range. Ultra-precision machining technology is used not only for manufacturing  symmetrical spherical and aspheric workpieces, but also to produce some very complex and non-symmetrical microstructures.

This presentation mainly introduces recent research advancement in the field of ultra-precision machining. These include the content of ultraprecision machining and the combination of physical energy fields such as magnetic fields, ultrasonic, laser, and electric fields on difficult-to-machine and hard and brittle materials, as well as the theory and methods of ultraprecision machining of  micro/nano structures.

Biography: Prof. Sandy, Suet To is a Professor of the Department of Industrial and Systems Engineering of The Hong Kong Polytechnic University, Associate Director of State Key Laboratory of Ultra-precision Machining Technology and Advanced Optics Manufacturing Centre. Prof. To obtained her PhD in Ultra-precision Machining Technology from The Hong Kong Polytechnic University. Her research interests include mechanism of ultra-precision machining, design and machining of micro-nanostructures, influence of materials in ultra-precision machining, processing mechanism of brittle materials and other materials, machining strategy of multi-axis ultra-precision machining, tool path generation and smart manufacturing. She has published 4 research books, more than 280 international SCI referred journal papers and over 150 international conference papers.Prof. To has successfully received grants from more than 25 research projects including National Natural Science Foundation of China, General Research Fund from Hong Kong Research Grants Council, Innovation and Technology Fund of the Hong Kong Innovation and Technology Commission, and the research projects jointly organized by the European Commission/Hong Kong Research Grants Council, etc. Prof. To holds various honorary positions in professional bodies including Board Member of the Asian Society for Precision Engineering and Nanotechnology (ASPEN), Committee Member of the Production Engineering Division of the Chinese Society for Mechanical Engineers (CSME) and Associate Member of the International Academy for Production Engineering (CIRP). She also serves as Associate Editor of International Journal of Materials Processing Technology and Editorial Board member in several international journals.


Chengyong Wang

Prof. Chengyong Wang

Guangdong University of Technology

Laser manufacturing of cemented carbide coated tools

Abstract: This study advocates for laser processing technology, which integrated high energy, speed, and precision, as a novel alternative in manufacturing cemented carbide-coated cutting tools. This study investigates the laser fabrication methods for cemented carbide cutting tools. It clarifies the effects of varying laser parameters on material removal, nano-texture features, micro-textured arrays, grain structure evolution, and mechanical properties, which reveals how ultrafast lasers refine and strengthen cemented carbide microstructures. Based on self-developed turning-milling composite multi-laser machining platform, we have developed full laser processing technologies for micro-edge tools, laser blunting, and micro-texture micro-drill tool fabrication, thereby realizing controllable laser production of cemented carbide tools. Building upon this foundation, we performed first-principles calculations to forecast the atomic structure of the nanotexture-PVD coating interface. Subsequently, the regulatory mechanism of laser-induced nanotexture on nanocrystalline coherently matched interfaces is revealed. Furthermore, we conducted an in-depth investigation into the organizational features, grain boundary distribution, and dislocation types of the PVD coating grown on the nanotexture surface. Cutting tools with nanocrystalline coatings featuring a fine-grained bottom layer and a mixed coarse-fine grained middle layer are fabricated successfully. Finally, application cases of laser-manufactured cemented carbide coated cutting tools are presented. In summary, this report illuminates the laser manufacturing of cemented carbide cutting tools from a holistic perspective, which is poised to further drive the development in the field of hard cutting tool manufacturing.

Biography: Prof. Wang received the bachelor's, master's and doctoral degrees in mechanical manufacturing from Nanjing Institute of Technology (now Southeast University), Huaqiao University and Dalian University of Technology in 1983, 1986 and 1989 respectively. Currently, he is the vice-president of Guangdong University of Technology and the State Council special allowance expert. Prof. Wang has long been engaged in the processing of difficult-to-machine materials, biological tissue processing and medical device research. Currently, he is the director of the Guangdong Provincial Key Laboratory of Minimally Invasive Surgical Instruments and Manufacturing Technology and the director of the Guangdong Provincial Engineering Technology Research Center of Printed Electronics Manufacturing. He serves as a member of the teaching steering committee for higher education majors in mechanical engineering of the Ministry of Education and the Chairman of the undergraduate teaching steering committee of mechanical engineering for the universities in Guangdong. Prof. Wang has presided over many projects, such as 12 projects from the National Natural Science Foundation of China (including 3 key programs), national key research and development program, and other national, provincial and ministerial level and enterprise-commissioned projects. Prof. Wang published multiple papers in journals, such as IJMTM, JMPT, and Chinese Journal of Mechanical Engineering (Chinese and English edition). He has authorized more than 140 invention patents. Some of his research results have been industrialized. Prof. Wang won the second prize of the National Science and Technology Progress Award (2019) and the first prize of the China Machinery Industry Science and Technology Award (2018), the first prize of the Guangdong Province Science and Technology Progress Award, the second prize of the Guangdong Province Science and Technology Award in Natural Science (2009). He won the Ding Ying Science and Technology Award of Guangdong Province in 2021.



Prof. Kazuya Yamamura

Osaka University


Plasma and electrochemical nanomanufacturing processes for ultra-precision figuring and atomic order smoothening of difficult-to-polish materials

Abstract: Our research group is actively developing a nano-precision figuring process using atmospheric pressure plasma and a new highly efficient, damage-free, slurry-less polishing process that uses plasma and electrochemical processes. We call these processes "plasma-assisted/electrochemical-assisted nanomanufacturing processes," and we are conducting research and development to break through the limits of conventional machining and innovate manufacturing technology. In my presentation, I will introduce the principles of these processes and the results of applying them to various difficult-to-polish functional materials such as SiC, GaN, and diamond.

Biography: Prof. Yamamura started his carrier as an Assistant Professor at the Department of Precision Engineering of Osaka University. He obtained the Degree of Dr.-Eng from Osaka University in 2001. His research area is the development of unconventional ultraprecision fabrication method and its application. He developed methods using chemical reaction for ultraprecision figuring and finishing of optical components and functional materials. Recently, He expanded his research area to functionalization of material surface by irradiation of atmospheric pressure plasma. He accumulated educational and research carrier as a scholar and a supervisor of graduate students. He has developed an ultra-precision figuring technique and polishing technique that uses plasma. He has also developed a novel slurryless electrochemical mechanical polishing technology. Some of his research works have been presented at General Assemblies of CIRP. He is also active in academic societies, and he is an associate member of CIRP and a fellow of JSPE. He has also contributed much to the transfer of developed novel fabrication technology to companies for practical use.


Ks Yan

Prof. Jiwang Yan

Keio University


 Subsurface damage in ultrapreicison machining of brittle materials - some comparisons

Abstract: Brittle materials are widely used for producing important components in the industry of optics, optoelectronics, and semiconductors. Ultraprecision machining of brittle materials with high surface quality and subsurface integrity helps improve the functional performance of the components. However, the machining-induced subsurface damage remains as a critical issue, the mechanism of which has not been well understood. In this talk, a comprehensive review of recent advances in the fundamental research of subsurface damage in ultraprecision machining of various brittle materials will be compared based on the results of the speaker’s group. The effects workpiece material hardness, crystal structure/orientation, shape/curvature, tool geometry, cutting speed, and coolant/lubricant will be analyzed. The relationship among chip formation, surface topography, and subsurface damage for different machining methods including diamond turning, end milling, ultraprecision grinding, and burnishing are compared in terms of tool-workpiece interaction. Challenges and possibilities for future R&D in this area are discussed.

Biography: Prof. Yan received his Ph.D. from Tohoku University in 2000 and is currently a Professor of Mechanical Engineering at Keio University, Japan (2012-), leading the Laboratory for Precision Machining and Nano Processing. As adjunct positions, he was appointed as a Leverhulme Visiting Professor at The University of Manchester, UK (2018-19), and servs as a Specially Appointed Professor (adjunct) at Tokyo Institute of Technology (2017-). His research areas include ultraprecision machining, micro/nano manufacturing, laser processing, nanomaterial and nanomechanics. As a principal investigator, he has led more than 20 nationally funded projects and over 70 joint research projects with industry. He has authored/co-authored 300+ peer-refereed journal papers, given 150+ keynote/invited talks, and received 40+ awards for his contribution in the manufacturing area. He is the chief-editor of handbook “Micro and Nano Fabrication Technology” (Springer 2018) and the author of book “Micro Nano Scale Laser Processing of Hard Brittle Materials” (Elsevier 2019). He is an executive director of JSPE and the chairman of publication sector and also serves the board of JSLT and the editorial boards of several international journals including IJMTM and IJEM. He is member of JSME, JSPE, JSAP, JSAT, ASPE, SME, euspen and CIRP, and fellow of ISNM.



Prof. Shaohui Yin

Hunan University


Key processes and equipment for molding manufacturing of ultra-precision glass optical elements 

Abstract: The application of ultra-precision optical glass elements has increased explosively in recent years, requiring sub-micron face shape accuracy, nanometer surface roughness, nanometer damage, and also increasingly high production efficiency requirements. Glass is characterized with high hardness and high brittleness, and traditional processing technology is difficult to meet the requirements of high efficiency and low damage. Precision glass molding technology, as the most advanced and revolutionary technology for manufacturing precision optical elements, enables high-volume, low-cost, and high-stability manufacturing of glass optical elements, and it is the focus of research in both academia and industry. In this report, we will introduce from the perspective of "new methods - new tools - new processes - new equipment" to the ultra-precision optical glass element molding manufacturing set of key processes and equipment. We will focus on the team's research achievement in ultra-precision composite processing machine and process, mold processing technology, molding process and equipment. Finally, the technical challenges and development trends of optical glass element molding technology are analyzed and outlooked.

Biography: Prof. Shaohui Yin is a professor and doctoral supervisor of Hunan University, a New Century Outstanding Talent of the Ministry of Education, a Yuelu Scholar, and a doctor of engineering from Japan. He is the director of the Wuxi Semiconductor Advanced Manufacturing Innovation Center of Hunan University and the deputy director of the National Engineering Research Center for High Efficiency Grinding of Hunan University. Moreover, he also serves as Vice Chairman of the Board of Directors of the China-Japan International Conference on Ultra-Precision Machining (CJUMP), a member of the International Committee of Abrasive Technology (ICAT), and a standing member of the Production Engineering Branch of the Chinese Academy of Mechanical Engineering. Prof. Yin Shaohui has been long engaged in the research of ultra-precision machining and micro-nano manufacturing, semiconductor machining process and equipment, glass optical elements nano-precision manufacturing processes and equipment and other directions. He has chaired more than 40 projects such as key projects of National Natural Science Foundation of China, National Key R&D Program, and National 04 Science and Technology Major Projects. He has published more than 260 academic papers and authorized more than 40 patents, and won the First Prize of Hunan Provincial Science and Technology Progress Award and the First Prize of China Machinery Industry Science and Technology Award as the first finisher.


Libo Zhou

Prof. Libo Zhou

National Ibaraki University

Theoretical & empirical analysis on effects of abrasive size variation on grinding performance

Abstract: The grinding wheel is comprised by three elements; abrasive grain, bonding material and pore, which are specified by five factors; type of abrasive grain, grain size, type of bonding material, grade of hardness and abrasive grain volume percentage.  Regarding the abrasive grain, it is well known that shape and number of cutting edge significantly effects grinding performance such as surface roughness, grinding force and wheel service life.  In general, abrasive grain size is determined by mean diameter of abrasive grain.  However, the abrasive grains in a grinding wheel are randomly scraggly in size and shape.  There is no particular aspect to regulate the grain size variation.  This talk reports the effect of grain size variation on the ground surface topography by actual grinding on silicon wafers and analysis based on grinding simulation.  The results reveal that the standard deviation of grain size is an important index to characterize the grinding performance of a wheel.  Smaller standard deviation leads to larger density of effective cutting-edge under the same volume percentage of abrasive grain contained in the wheel.  This fact significantly contributes to not only achieve a better surface roughness and more uniform surface integrity, but also shorten the finishing time.

Biography: Prof. Libo Zhou received his MS and PhD degrees from the Tohoku University in Japan in 1988 and 1991.  Currently, he is a full professor of Department of Mechanical System in School of Science and Engineering, National Ibaraki University, oversee research activities of traditional and non-traditional manufacturing processes.  His research interests cover ultra-precision machining and evaluation, recently are extended to applications of A.I for smart manufacturing.


*In alphabetical order